| 9926639 |
Methods for forming barrier/seed layers for copper interconnect structures |
Hoon Kim, Wei Ti Lee, Sang Ho Yu, Seshadri Ganguli, Sang-Hyeob Lee |
2018-03-27 |
| 9209074 |
Cobalt deposition on barrier surfaces |
Jiang Lu, Paul F. Ma, Seshadri Ganguli, Joseph AuBuchon, Sang Ho Yu +1 more |
2015-12-08 |
| 9129945 |
Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performance |
Sang-Hyeob Lee, Sang Ho Yu, Wei Ti Lee, Seshadri Ganguli, Hoon Kim |
2015-09-08 |
| 9051641 |
Cobalt deposition on barrier surfaces |
Jiang Lu, Paul F. Ma, Seshadri Ganguli, Joseph AuBuchon, Sang Ho Yu +1 more |
2015-06-09 |
| 8637390 |
Metal gate structures and methods for forming thereof |
Seshadri Ganguli, Sang Ho Yu, Sang-Hyeob Lee, Wei Ti Lee, Hoon Kim +4 more |
2014-01-28 |
| 8563424 |
Process for forming cobalt and cobalt silicide materials in tungsten contact applications |
Seshadri Ganguli, Sang Ho Yu, See-Eng Phan, Mei Chang, Amit Khandelwal |
2013-10-22 |
| 8187970 |
Process for forming cobalt and cobalt silicide materials in tungsten contact applications |
Seshadri Ganguli, Sang Ho Yu, See-Eng Phan, Mei Chang, Amit Khandelwal |
2012-05-29 |
| 7867578 |
Method for depositing an amorphous carbon film with improved density and step coverage |
Deenesh Padhi, Sudha Rathi, Derek R. Witty, Chiu Chan, Sohyun Park +6 more |
2011-01-11 |
| 5563077 |
Method of fabricating a thin film transistor having vertical channel |
— |
1996-10-08 |
| 5554547 |
Process for the production of thin film transistor using oxygen plasma |
— |
1996-09-10 |
| 5508531 |
Thin film transistor (TFT) and method of manufacturing thereof |
— |
1996-04-16 |
| 5401685 |
Method for hydrogenating thin film transistor by using a spin-on-glass film |
— |
1995-03-28 |
| 5366910 |
Process for the production of thin film transistors using on SOG film |
Dong Kwon Choi |
1994-11-22 |
