Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515121 | Electron beam device | Tomohiko Ogata, Masaki Hasegawa, Noriyuki Kaneoka, Katsunori Onuki | 2022-11-29 |
| 11107655 | Charged particle beam device | Tomohiko Ogata, Masaki Hasegawa, Katsunori Onuki, Noriyuki Kaneoka | 2021-08-31 |
| 11002687 | Defect inspection method and defect inspection device | Masaki Hasegawa, Katsunori Onuki, Noriyuki Kaneoka, Tomohiko Ogata | 2021-05-11 |
| 10923315 | Charged particle beam apparatus, and method of adjusting charged particle beam apparatus | Masaki Hasegawa, Tomohiko Ogata, Noriyuki Kaneoka, Katsunori Onuki | 2021-02-16 |
| 10522320 | Charged particle beam device and method for adjusting charged particle beam device | Tomohiko Ogata, Masaki Hasegawa, Katsunori Onuki, Noriyuki Kaneoka | 2019-12-31 |
| 10170273 | Charged particle beam device, and method of manufacturing component for charged particle beam device | Takashi Ichimura, Hiroyuki Ito, Shinichi Kato, Tadashi Fujieda, Tatsuya Miyake +3 more | 2019-01-01 |
| 10074506 | Method for manufacturing electron source | Takashi Ichimura, Hisao Nitta, Nobuyuki Sonobe, Boklae Cho | 2018-09-11 |
| 8803411 | Charged particle beam radiation apparatus | Shunichi Watanabe, Takashi Onishi, Minoru Kaneda | 2014-08-12 |
| 8766542 | Field-emission electron gun and method for controlling same | Boklae Cho, Shigeru Kokubo, Hisao Nitta | 2014-07-01 |
| 8502141 | Graphical user interface for use with electron beam wafer inspection | Masaki Hasegawa, Hiroshi Makino | 2013-08-06 |
| 8481935 | Scanning electron microscope | Akira Ikegami, Minoru Yamazaki, Hideyuki Kazumi, Koichiro Takeuchi | 2013-07-09 |
| 7989768 | Scanning electron microscope | Akira Ikegami, Minoru Yamazaki, Hideyuki Kazumi, Koichiro Takeuchi | 2011-08-02 |
| 7982188 | Apparatus and method for wafer pattern inspection | Hiroyuki Shinada, Hideo Todokoro, Hiroshi Makino, Yoshihiro Anan | 2011-07-19 |
| 7566871 | Method and apparatus for pattern inspection | Masaki Hasegawa, Hiroshi Makino | 2009-07-28 |
| 7547884 | Pattern defect inspection method and apparatus thereof | Masaki Hasegawa, Hiroshi Makino, Hikaru Koyama, Zhaohui Cheng | 2009-06-16 |
| 7411190 | Inspection system, inspection method, and process management method | Hiroshi Makino, Hiroyuki Shinada, Hideo Todokoro | 2008-08-12 |
| 7397031 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe +5 more | 2008-07-08 |
| 7394066 | Electron microscope and electron beam inspection system | Masaki Hasegawa, Hideo Todokoro | 2008-07-01 |
| 7288948 | Patterned wafer inspection method and apparatus therefor | Masaki Hasegawa | 2007-10-30 |
| 7242015 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Masaki Hasegawa, Mari Nozoe, Atsuko Takafuji +4 more | 2007-07-10 |
| 7098455 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe +5 more | 2006-08-29 |
| 7075076 | Inspection system, inspection method, and process management method | Hiroshi Makino, Hiroyuki Shinada, Hideo Todokoro | 2006-07-11 |
| 7022986 | Apparatus and method for wafer pattern inspection | Hiroyuki Shinada, Hideo Todokoro, Hiroshi Makino, Yoshihiro Anan | 2006-04-04 |
| 6979823 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Masaki Hasegawa, Mari Nozoe, Atsuko Takafuji +4 more | 2005-12-27 |
| 6797954 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Masaki Hasegawa, Mari Nozoe, Atsuko Takafuji +4 more | 2004-09-28 |