Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362202 | Substrate processing method and substrate processing apparatus | Masatoshi Kasahara, Teruomi Minami, Ikuo Sunaka | 2025-07-15 |
| 11869777 | Substrate processing method and substrate processing apparatus | Masatoshi Kasahara, Teruomi Minami, Ikuo Sunaka | 2024-01-09 |
| 11712710 | Substrate processing apparatus and substrate processing method | Takahisa Otsuka, Hiroshi Komiya, Nobuhiro Ogata | 2023-08-01 |
| 10811266 | Substrate liquid processing apparatus and method, and computer-readable storage medium storing substrate liquid processing program | Hiromi Hara | 2020-10-20 |
| 9627192 | Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing program | Naoyuki Okamura, Kazuki Kosai, Kazuhiro Teraoka | 2017-04-18 |
| 9415356 | Chemical-liquid mixing method and chemical-liquid mixing apparatus | Hiroshi Tanaka, Koukichi Hiroshiro | 2016-08-16 |
| 9339775 | Chemical-liquid mixing method and chemical-liquid mixing apparatus | Hiroshi Tanaka, Koukichi Hiroshiro | 2016-05-17 |
| 9099502 | Chemical-liquid mixing method and chemical-liquid mixing apparatus | Hiroshi Tanaka, Koukichi Hiroshiro | 2015-08-04 |
| 8475668 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein | Hiroshi Tanaka, Teruomi Minami, Yosuke Kawabuchi, Norihiro Ito, Takashi Yabuta +4 more | 2013-07-02 |
| 8303723 | Liquid processing apparatus, liquid processing method, and storage medium | Teruomi Minami, Kazuki Kosai, Takashi Yabuta, Kenji Yokomizo, Shogo Mizota | 2012-11-06 |