| 8349226 |
Method of increasing the laser damage threshold of diffraction gratings |
Stefan Borneis, Dasa Javorkova, Paul Neumayer |
2013-01-08 |
| 7567607 |
Very narrow band, two chamber, high rep-rate gas discharge laser system |
David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more |
2009-07-28 |
| 7218661 |
Line selected F2 two chamber laser system |
David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Herve A. Besaucele +8 more |
2007-05-15 |
| 7061961 |
Very narrow band, two chamber, high rep-rate gas discharge laser system |
David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more |
2006-06-13 |
| 7058107 |
Line selected F2 two chamber laser system |
David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Herve A. Besaucele +8 more |
2006-06-06 |
| 6985508 |
Very narrow band, two chamber, high reprate gas discharge laser system |
David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Meyers, Alexander I. Ershov +10 more |
2006-01-10 |
| 6801560 |
Line selected F2 two chamber laser system |
David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Herve A. Besaucele +8 more |
2004-10-05 |
| 6765945 |
Injection seeded F2 laser with pre-injection filter |
Richard L. Sandstrom, William N. Partlo |
2004-07-20 |
| 6735236 |
High power gas discharge laser with line narrowing unit |
Raymond F. Cybulski, Alexander I. Ershov, Palash P. Das, Danilo K. Richardson, Jesse Buck |
2004-05-11 |
| 6625191 |
Very narrow band, two chamber, high rep rate gas discharge laser system |
David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, Alexander I. Ershov +10 more |
2003-09-23 |
| 6590922 |
Injection seeded F2 laser with line selection and discrimination |
Richard L. Sandstrom, Richard M. Ness, William N. Partlo, Alexander I. Ershov, Choonghoon Oh |
2003-07-08 |
| 6567450 |
Very narrow band, two chamber, high rep rate gas discharge laser system |
David W. Myers, Herve A. Besaucele, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom +7 more |
2003-05-20 |
| 6560263 |
Discharge laser having electrodes with sputter cavities and discharge peaks |
Richard G. Morton, Zsolt Bor |
2003-05-06 |
| 6556600 |
Injection seeded F2 laser with centerline wavelength control |
Richard L. Sandstrom, Richard M. Ness, William N. Partlo, Alexander I. Ershov, Choonghoon Oh |
2003-04-29 |
| 6539042 |
Ultra pure component purge system for gas discharge laser |
Shahryar Rokni, Xiaojiang Pan |
2003-03-25 |
| 6466602 |
Gas discharge laser long life electrodes |
Vladimir B. Fleurov, Michael C. Cates, Michael Du'Lyea, Igor V. Fomenkov, Dmitri V. Gaidarenko +4 more |
2002-10-15 |
| 6381257 |
Very narrow band injection seeded F2 lithography laser |
Alexander I. Ershov, Palash P. Das, William N. Partlo, Thomas Hofmann |
2002-04-30 |
| 6370174 |
Injection seeded F2 lithography laser |
Palash P. Das, Thomas Patrick Duffey, Richard L. Sandstrom, Alexander I. Ershov, William N. Partlo |
2002-04-09 |
| 6359922 |
Single chamber gas discharge laser with line narrowed seed beam |
William N. Partlo, Xiaojiang Pan |
2002-03-19 |
| 6330260 |
F2 laser with visible red and IR control |
Richard L. Sandstrom, Thomas Patrick Duffey |
2001-12-11 |
| 6317447 |
Electric discharge laser with acoustic chirp correction |
William N. Partlo, Igor V. Fomenkov, Jean-Marc Hueber, Zsolt Bor, Michael C. Cates +3 more |
2001-11-13 |
| 5529813 |
Process for microstructuring surfaces of oriented polymeric substratesusing laser radiation |
Henry Kobsa, Hermann Bucher |
1996-06-25 |