Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682570 | Process-induced displacement characterization during semiconductor production | Pradeep Vukkadala, Mark D. Smith, Ady Levy, Prasanna Dighe | 2023-06-20 |
| 11441893 | Multi-spot analysis system with multiple optical probes | Prasanna Dighe, Dong Chen, Dengpeng Chen, Steve Zamek, Daniel Kavaldjiev +1 more | 2022-09-13 |
| 11164768 | Process-induced displacement characterization during semiconductor production | Pradeep Vukkadala, Mark D. Smith, Ady Levy, Prasanna Dighe | 2021-11-02 |
| 11049720 | Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films | Prasanna Dighe, Xiaomeng Shen, Jason Saito | 2021-06-29 |
| 9273952 | Grazing and normal incidence interferometer having common reference surface | Rainer Schierle, Daniel Kavaldjiev | 2016-03-01 |
| 8068234 | Method and apparatus for measuring shape or thickness information of a substrate | Shouhong Tang, George Kren, Brian Haas, Daniel Kavaldjiev | 2011-11-29 |
| 7505144 | Copper CMP flatness monitor using grazing incidence interferometry | George Kren, Cedric Affentauschegg | 2009-03-17 |
| 7433047 | Runout characterization | David R. Peale, Kyle Brown | 2008-10-07 |
| 7173715 | Reduced coherence symmetric grazing incidence differential interferometer | Rainer Schierle, Daniel Kavaldjiev | 2007-02-06 |
| 7057741 | Reduced coherence symmetric grazing incidence differential interferometer | Daniel Kavaldjiev, Rainer Schierle | 2006-06-06 |
| 6806966 | Copper CMP flatness monitor using grazing incidence interferometry | George Kren, Cedric Affentauschegg | 2004-10-19 |