Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11333487 | Common path mode fiber tip diffraction interferometer for wavefront measurement | Haifeng Huang, Rui-fang Shi, Robert Kestner | 2022-05-17 |
| 9702693 | Apparatus for measuring overlay errors | Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy | 2017-07-11 |
| 8502979 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad +2 more | 2013-08-06 |
| 8330281 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy | 2012-12-11 |
| 8179530 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad +2 more | 2012-05-15 |
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2011-04-26 |
| 7879627 | Overlay marks and methods of manufacturing such marks | Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy | 2011-02-01 |
| 7751046 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad +2 more | 2010-07-06 |
| 7663753 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2010-02-16 |
| 7463369 | Systems and methods for measuring one or more characteristics of patterned features on a specimen | Haiming Wang, Kenneth P. Gross | 2008-12-09 |
| 7460981 | Methods and systems for determining a presence of macro and micro defects on a specimen | Gary Bultman, Ady Levy, Kyle Brown, Mehrdad Nikoonahad, John Fielden | 2008-12-02 |
| 7349090 | Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography | Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, John Fielden | 2008-03-25 |
| 7317531 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +10 more | 2008-01-08 |
| 7317824 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy | 2008-01-08 |
| 7301634 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +7 more | 2007-11-27 |
| 7274814 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy | 2007-09-25 |
| 7196782 | Methods and systems for determining a thin film characteristic and an electrical property of a specimen | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad | 2007-03-27 |
| 7181057 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Michael Adel, Mark Ghinovker, Walter D. Mieher, Ady Levy | 2007-02-20 |
| 7139083 | Methods and systems for determining a composition and a thickness of a specimen | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad | 2006-11-21 |
| 7130029 | Methods and systems for determining an adhesion characteristic and a thickness of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, John Fielden | 2006-10-31 |
| 7106425 | Methods and systems for determining a presence of defects and a thin film characteristic of a specimen | Gary Bultman, Ady Levy, Kyle Brown, Mehrdad Nikoonahad, John Fielden | 2006-09-12 |
| 7068833 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Mark Ghinovker, Michael Adel, Walter D. Mieher, Ady Levy | 2006-06-27 |
| 7006235 | Methods and systems for determining overlay and flatness of a specimen | Ady Levy, Kyle Brown, Mehrdad Nikoonahad, Gary Bultman, John Fielden | 2006-02-28 |
| 6950196 | Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad | 2005-09-27 |
| 6946394 | Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad | 2005-09-20 |