Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7324865 | Run-to-run control method for automated control of metal deposition processes | Thomas J. Sonderman, Scott Bushman | 2008-01-29 |
| 6684122 | Control mechanism for matching process parameters in a multi-chamber process tool | Bradley Marc Davis, Allen L. Evans | 2004-01-27 |
| 6650957 | Method and apparatus for run-to-run control of deposition process | William J. Campbell, Thomas J. Sonderman | 2003-11-18 |
| 6630360 | Advanced process control (APC) of copper thickness for chemical mechanical planarization (CMP) optimization | James Stice | 2003-10-07 |
| 6512991 | Method and apparatus for reducing deposition variation by modeling post-clean chamber performance | Bradley Marc Davis, Allen L. Evans | 2003-01-28 |
| 6500681 | Run-to-run etch control by feeding forward measured metal thickness | H. Jim Fulford | 2002-12-31 |
| 6469518 | Method and apparatus for determining measurement frequency based on hardware age and usage | Bradley Marc Davis, Allen L. Evans | 2002-10-22 |
| 6454899 | Apparatus for filling trenches | William J. Campbell, H. Jim Fulford, Christopher H. Raeder, Thomas J. Sonderman | 2002-09-24 |
| 6403151 | Method for controlling optical properties of antireflective coatings | Bradley Marc Davis, Allen L. Evans | 2002-06-11 |
| 6284622 | Method for filling trenches | William J. Campbell, H. Jim Fulford, Christopher H. Raeder, Thomas J. Sonderman | 2001-09-04 |
| 6271112 | Interlayer between titanium nitride and high density plasma oxide | Christopher Wooten, Thomas E. Spikes, Jr., Allen L. Evans, Tim Z. Hossain | 2001-08-07 |
| 5914879 | System and method for calculating cluster tool performance metrics using a weighted configuration matrix | Qingsu Wang, John B. Crowley, Denver L. Dolman | 1999-06-22 |
| 5661335 | Semicondutor having selectively enhanced field oxide areas and method for producing same | Mohammed Anjum, Ibrahim K. Burki | 1997-08-26 |
| 5550084 | Integrated circuit fabrication using a metal silicide having a sputterdeposited metal nitride layer | Mohammed Anjum, Ibrahim K. Burki | 1996-08-27 |
| 5470794 | Method for forming a silicide using ion beam mixing | Mohammed Anjum, Ibrahim K. Burki | 1995-11-28 |
| 5444024 | Method for low energy implantation of argon to control titanium silicide formation | Mohammed Anjum, Ibrahim K. Burki | 1995-08-22 |
| 5401674 | Germanium implant for use with ultra-shallow junctions | Mohammed Anjum, Ibrahim K. Burki | 1995-03-28 |
| 5393676 | Method of fabricating semiconductor gate electrode with fluorine migration barrier | Mohammed Anjum, Ibrahim K. Burki | 1995-02-28 |
| 5372951 | Method of making a semiconductor having selectively enhanced field oxide areas | Mohammed Anjum, Ibrahim K. Burki | 1994-12-13 |