Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172264 | Carrier head membrane with regions of different roughness | Young J. Paik, Kadthala Ramaya Narendrnath | 2024-12-24 |
| 11738421 | Method of making carrier head membrane with regions of different roughness | Young J. Paik, Kadthala Ramaya Narendrnath | 2023-08-29 |
| 11007619 | Carrier head membrane with regions of different roughness | Young J. Paik, Kadthala Ramaya Narendrnath | 2021-05-18 |
| 10177014 | Thermal radiation barrier for substrate processing chamber components | Govinda Raj, Daniel L. Martin, Robert T. Hirahara, Bopanna Vasanth, Prashanth Rao +1 more | 2019-01-08 |
| 10168229 | EMI/RF shielding of thermocouples | Govinda Raj, Bopanna Ichettria Vasantha, Cariappa Baduvamanda | 2019-01-01 |
| 10160093 | Carrier head membrane roughness to control polishing rate | Young J. Paik, Kadthala Ramaya Narendrnath | 2018-12-25 |
| 10131126 | Methods for bonding substrates | Kadthala Ramaya Narendrnath, Gangadhar Sheelavant, Monika Agarwal | 2018-11-20 |
| 9960019 | Life enhancement of ring assembly in semiconductor manufacturing chambers | Sandhya Arun, Prashanth Kodigepalli, Padma Gopalakrishnan, Dan Martin, Christopher Heath John Hossack | 2018-05-01 |
| 9823133 | EMI/RF shielding of thermocouples | Govinda Raj, Bopanna Ichettria, Cariappa Baduvamanda | 2017-11-21 |
| 9627231 | Methods for bonding substrates | Kadthala Ramaya Narendrnath, Gangadhar Sheelavant, Monika Agarwal | 2017-04-18 |
| 9481608 | Surface annealing of components for substrate processing chambers | Laxman Murugesh, Padma Gopalakrishnan | 2016-11-01 |
| 9227297 | Retaining ring with attachable segments | Irfanulla Khuddus Rahmathullah, Bopanna Ichettira Vansantha, Padma Gopalakrishnan, Abraham Palaty, Aswathnarayanaiah Ravi +3 more | 2016-01-05 |
| 9168631 | Two-part retaining ring with interlock features | Irfanulla Khuddus Rahmathullah, Bopanna Ichettira Vansantha, Padma Gopalakrishnan, Aswathnarayanaiah Ravi, Abraham Palaty +3 more | 2015-10-27 |
| 8740206 | Life enhancement of ring assembly in semiconductor manufacturing chambers | Sandhya Arun, Prashanth Kodigepalli, Padma Gopalakrishnan, Dan Martin, Christopher Heath John Hossack | 2014-06-03 |
| 8722389 | Method and system of culturing an algal mat | Keshav C. Das, Benjamin R. Cannon, Senthil Chinnasamy | 2014-05-13 |
| 8662957 | Leak proof pad for CMP endpoint detection | Young J. Paik, Christopher R. Mahon, Kadthala Ramaya Narendrnath | 2014-03-04 |
| 8617672 | Localized surface annealing of components for substrate processing chambers | Laxman Murugesh, Padma Gopalakrishnan | 2013-12-31 |
| 8475231 | Carrier head membrane | Young J. Paik, Kadthala Ramaya Narendrnath | 2013-07-02 |
| 8464594 | Measuring flow properties of multiple gas nozzles of a gas distributor | Kadthala Ramaya Narendrnath, Daniel L. Martin, Robert T. Hirahara, Gangadhar Sheelavant | 2013-06-18 |
| 8225927 | Method to substantially enhance shelf life of hygroscopic components and to improve nano-manufacturing process tool availablity | Kadthala Ramaya Narendrnath | 2012-07-24 |
| 8043433 | High efficiency electro-static chucks for semiconductor wafer processing | — | 2011-10-25 |
| 7732056 | Corrosion-resistant aluminum component having multi-layer coating | Laxman Murugesh | 2010-06-08 |
| 7045020 | Cleaning a component of a process chamber | Charles S. Kunze | 2006-05-16 |
| 6824748 | Heated catalytic treatment of an effluent gas from a substrate fabrication process | Tony Kaushal, Shamouil Shamouilian, Harshad Borgaonkar, Kwok Manus Wong, Michael G. Chafin | 2004-11-30 |
| 6673323 | Treatment of hazardous gases in effluent | Tony Kaushal, Kwok Manus Wong, Shamouil Shamouilian | 2004-01-06 |