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Dithering or dynamic offsets for improved uniformity |
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| 12077861 |
Dithering or dynamic offsets for improved uniformity |
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| 11823870 |
PEALD titanium nitride with direct microwave plasma |
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| 11791172 |
Methods of controlling gas pressure in gas-pulsing-based precursor distribution systems |
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| 11791190 |
Apparatus and methods for real-time wafer chucking detection |
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| 11646226 |
Method of tuning film properties of metal nitride using plasma |
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| 11623253 |
In-situ DC plasma for cleaning pedestal heater |
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| 11599069 |
Method for auto-tuning and process performance assessment of chamber control |
Mauro Cimino, Sanjeev Baluja |
2023-03-07 |
| 11260432 |
In-situ DC plasma for cleaning pedestal heater |
Tejas Ulavi, Sanjeev Baluja, Wei V. Tang |
2022-03-01 |
| 11220747 |
Complementary pattern station designs |
Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Hanhong Chen |
2022-01-11 |
