Issued Patents All Time
Showing 25 most recent of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8615314 | Process control using analysis of an upstream process | Thomas J. Sonderman, Christopher A. Bode | 2013-12-24 |
| 8359494 | Parallel fault detection | Elfido Coss, Jr., Ernest D. Adams, III, Robert J. Chong, Howard E. Castle, Thomas J. Sonderman | 2013-01-22 |
| 8017411 | Dynamic adaptive sampling rate for model prediction | Thomas J. Sonderman, Gregory A. Cherry | 2011-09-13 |
| 7797073 | Controlling processing of semiconductor wafers based upon end of line parameters | Christopher A. Bode | 2010-09-14 |
| 7581140 | Initiating test runs based on fault detection results | Elfido Coss, Jr., Brian K. Cusson, Naomi M. Jenkins | 2009-08-25 |
| 7424392 | Applying a self-adaptive filter to a drifting process | Jin Wang, Robert J. Chong, Christopher A. Bode, Si QIN | 2008-09-09 |
| 7117062 | Determining transmission of error effects for improving parametric performance | Thomas J. Sonderman, Robert J. Chong, Brian K. Cusson | 2006-10-03 |
| 7103439 | Method and apparatus for initializing tool controllers based on tool event data | Christopher A. Bode, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2006-09-05 |
| 7067333 | Method and apparatus for implementing competing control models | Matthew A. Purdy | 2006-06-27 |
| 6988017 | Adaptive sampling method for improved control in semiconductor manufacturing | Anthony J. Toprac, Michael L. Miller | 2006-01-17 |
| 6978189 | Matching data related to multiple metrology tools | Christopher A. Bode, Matthew A. Purdy | 2005-12-20 |
| 6970757 | Method and apparatus for updating control state variables of a process control model based on rework data | Joyce S. Oey Hewett, Anthony J. Toprac, Christopher A. Bode, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2005-11-29 |
| 6969672 | Method and apparatus for controlling a thickness of a conductive layer in a semiconductor manufacturing operation | Joyce S. Oey Hewett | 2005-11-29 |
| 6968252 | Method and apparatus for dispatching based on metrology tool performance | James Broc Stirton | 2005-11-22 |
| 6961636 | Method and apparatus for dynamically monitoring controller tuning parameters | Robert J. Chong, Thomas J. Sonderman | 2005-11-01 |
| 6947803 | Dispatch and/or disposition of material based upon an expected parameter result | Christopher A. Bode | 2005-09-20 |
| 6937914 | Method and apparatus for controlling process target values based on manufacturing metrics | Christopher A. Bode, Thomas J. Sonderman, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2005-08-30 |
| 6925347 | Process control based on an estimated process result | Michael L. Miller, Thomas J. Sonderman, Richard J. Markle, Brian K. Cusson, Patrick M. Cowan +2 more | 2005-08-02 |
| 6917849 | Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters | Thomas J. Sonderman | 2005-07-12 |
| 6912433 | Determining a next tool state based on fault detection information | Robert J. Chong, Michael L. Miller, Eric O. Green | 2005-06-28 |
| 6907369 | Method and apparatus for modifying design constraints based on observed performance | Richard J. Markle, Robert J. Chong | 2005-06-14 |
| 6901340 | Method and apparatus for distinguishing between sources of process variation | Joyce S. Oey Hewett, Christopher A. Bode, Anthony J. Toprac, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2005-05-31 |
| 6897075 | Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information | Christopher A. Bode | 2005-05-24 |
| 6821792 | Method and apparatus for determining a sampling plan based on process and equipment state information | Thomas J. Sonderman, Christopher A. Bode | 2004-11-23 |
| 6823231 | Tuning of a process control based upon layer dependencies | Christopher A. Bode | 2004-11-23 |