Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430680 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno | 2022-08-30 |
| 10312120 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno | 2019-06-04 |
| 10196741 | Wafer placement and gap control optimization through in situ feedback | Kevin Griffin, Abraham Ravid, Somesh Khandelwal, Joseph Yudovsky, Todd Egan | 2019-02-05 |
| 9538583 | Substrate support with switchable multizone heater | Leon Volfovski, Mayur Govind Kulkarni, Michael R. Rice | 2017-01-03 |
| 9296105 | Vibration-controlled substrate handling robots, systems, and methods | Nir Merry, Jeffrey C. Hudgens, Brendan Till | 2016-03-29 |
| 8880210 | Methods and apparatus for processing substrates using model-based control | Keith Brian Porthouse, John W. Lane, Mariusch Gregor, Nir Merry, Michael R. Rice +2 more | 2014-11-04 |