Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832533 | Conformal damage-free encapsulation of chalcogenide materials | James S. Sims, Andrew John McKerrow, Meihua Shen, Thorsten Lill, Shane Tang +4 more | 2023-11-28 |
| 11239420 | Conformal damage-free encapsulation of chalcogenide materials | James S. Sims, Andrew John McKerrow, Meihua Shen, Thorsten Lill, Shane Tang +4 more | 2022-02-01 |
| 10153282 | Ultra-high vacuum transport and storage | Theodoros Panagopoulos, Richard H. Gould, Edmundo Reyes, John D. Boniface, Ivan L. Berry, III +1 more | 2018-12-11 |
| 8449731 | Method and apparatus for increasing local plasma density in magnetically confined plasma | Anshu A. Pradhan, Douglas B. Hayden, Ronald L. Kinder | 2013-05-28 |
| 8343318 | Magnetic lensing to improve deposition uniformity in a physical vapor deposition (PVD) process | Karl Leeser, Ishtak Karim | 2013-01-01 |
| 7964504 | PVD-based metallization methods for fabrication of interconnections in semiconductor devices | Roey Shaviv, Daniel R. Juliano, Ronald L. Kinder | 2011-06-21 |
| 7922880 | Method and apparatus for increasing local plasma density in magnetically confined plasma | Anshu A. Pradhan, Douglas B. Hayden, Ronald L. Kinder | 2011-04-12 |
| 7855147 | Methods and apparatus for engineering an interface between a diffusion barrier layer and a seed layer | Asit Rairkar, Frank Greer, Anshu A. Pradhan, Robert T. Rozbicki | 2010-12-21 |
| 7745332 | PVD-based metallization methods for fabrication of interconnections in semiconductor devices | Roey Shaviv, Neil Mackie, Daniel R. Juliano, Robert T. Rozbicki | 2010-06-29 |
| 7645696 | Deposition of thin continuous PVD seed layers having improved adhesion to the barrier layer | Anil Vijayendran, Tom Yu, Daniel R. Juliano | 2010-01-12 |
| 6566246 | Deposition of conformal copper seed layers by control of barrier layer morphology | Tarek Suwwan de Felipe, Michal Danek, Erich R. Klawuhn | 2003-05-20 |