Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230495 | Method of depositing silicon nitride films | James S. Sims, Vikrant Rai, Andrew John McKerrow, Huatan Qiu | 2025-02-18 |
| 11832533 | Conformal damage-free encapsulation of chalcogenide materials | James S. Sims, Andrew John McKerrow, Meihua Shen, Thorsten Lill, Kathryn M. Kelchner +4 more | 2023-11-28 |
| 11239420 | Conformal damage-free encapsulation of chalcogenide materials | James S. Sims, Andrew John McKerrow, Meihua Shen, Thorsten Lill, Kathryn M. Kelchner +4 more | 2022-02-01 |
| 10804099 | Selective inhibition in atomic layer deposition of silicon-containing films | Jon Henri, Dennis M. Hausmann, Bart J. van Schravendijk, Karl Leeser | 2020-10-13 |
| 9875891 | Selective inhibition in atomic layer deposition of silicon-containing films | Jon Henri, Dennis M. Hausmann, Bart J. van Schravendijk, Karl Leeser | 2018-01-23 |
| 9589790 | Method of depositing ammonia free and chlorine free conformal silicon nitride film | Jon Henri, Dennis M. Hausmann, James S. Sims | 2017-03-07 |
| 9564312 | Selective inhibition in atomic layer deposition of silicon-containing films | Jon Henri, Dennis M. Hausmann, Bart J. van Schravendijk, Karl Leeser | 2017-02-07 |
| 9502238 | Deposition of conformal films by atomic layer deposition and atomic layer etch | Michal Danek, Jon Henri | 2016-11-22 |
| 9076646 | Plasma enhanced atomic layer deposition with pulsed plasma exposure | James S. Sims, Jon Henri, Kathryn M. Kelchner, Sathish Babu S. V. Janjam | 2015-07-07 |