Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230527 | Electrostatic chuck and substrate fixing device | Yusuke Muramatsu, Yoichi Harayama | 2025-02-18 |
| 12080583 | Base plate and substrate fixing device | Ken Sato, Tatsuya Nakamura | 2024-09-03 |
| 11909335 | Electrostatic chuck and substrate fixing device | Takashi Onuma | 2024-02-20 |
| 11830752 | Substrate fixing device, electrostatic chuck, and method of manufacturing electrostatic chuck | Yoichi Harayama | 2023-11-28 |
| 11699612 | Substrate fixing device, electrostatic chuck and electrostatic chuck manufacturing method | Yoichi Harayama, Hiroyuki Asakawa, Takahiro Rokugawa | 2023-07-11 |
| 11631598 | Substrate fixing device | Nobuyuki Iijima, Hiroyuki Asakawa, Yoichi Harayama | 2023-04-18 |
| 10535545 | Substrate fixing device | Yoichi Harayama, Yoji Asahi | 2020-01-14 |
| 10361110 | Substrate holding apparatus | Yoichi Harayama, Yoji Asahi, Shuzo Aoki | 2019-07-23 |
| 7276438 | Method of manufacturing wiring substrate | Yasuyoshi Horikawa | 2007-10-02 |