Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631598 | Substrate fixing device | Hiroyuki Asakawa, Keiichi Takemoto, Yoichi Harayama | 2023-04-18 |
| 11456200 | Substrate fixing apparatus including a base plate, an electrostatic adsorption member, a plurality of support members on the base plate and supporting the electrostatic adsorption member, and an adhesive layer bonding the electrostatic adsorption member to the base plate | Hiroharu Yanagisawa, Yuichi Nakamura, Ryuji Takahashi | 2022-09-27 |
| 11088006 | Electrostatic chuck | Takamasa Yoshikawa, Hiroharu Yanagisawa | 2021-08-10 |
| 4825359 | Data processing system for array computation | Takahide Ohkami, Teijiro Sakamoto, Toshiyuki Hirai | 1989-04-25 |