Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230527 | Electrostatic chuck and substrate fixing device | Yusuke Muramatsu, Keiichi Takemoto | 2025-02-18 |
| 11830752 | Substrate fixing device, electrostatic chuck, and method of manufacturing electrostatic chuck | Keiichi Takemoto | 2023-11-28 |
| 11699612 | Substrate fixing device, electrostatic chuck and electrostatic chuck manufacturing method | Keiichi Takemoto, Hiroyuki Asakawa, Takahiro Rokugawa | 2023-07-11 |
| 11631598 | Substrate fixing device | Nobuyuki Iijima, Hiroyuki Asakawa, Keiichi Takemoto | 2023-04-18 |
| 10535545 | Substrate fixing device | Yoji Asahi, Keiichi Takemoto | 2020-01-14 |
| 10361110 | Substrate holding apparatus | Keiichi Takemoto, Yoji Asahi, Shuzo Aoki | 2019-07-23 |
| 9538668 | Wiring substrate, method for manufacturing wiring substrate, and method for modifying surface of insulating layer | Hideki Yumoto | 2017-01-03 |
| 8129259 | Manufacturing method of preparing a substrate with forming and removing the check patterns in scribing regions before dicing to form semiconductor device | Takaharu Yamano | 2012-03-06 |
| 7811857 | Method of manufacturing semiconductor device | Takaharu Yamano | 2010-10-12 |
| 5997999 | Sintered body for manufacturing ceramic substrate | Michio Horiuchi, Yukiharu Takeuchi | 1999-12-07 |
| 5737191 | Structure and process for mounting semiconductor chip | Michio Horiuchi | 1998-04-07 |
| 5733640 | Fired body for manufacturing a substrate | Michio Horiuchi, Yukiharu Takeuchi | 1998-03-31 |
| 5702807 | Ceramic circuit board and manufacturing method thereof | Michio Horiuchi | 1997-12-30 |
| 5683791 | Ceramic oxide circuit board | Michio Horiuchi | 1997-11-04 |
| 5604018 | Ceramic oxide circuit board | Michio Horiuchi | 1997-02-18 |
| 5602059 | Semiconductor device and method for manufacturing same | Michio Horiuchi | 1997-02-11 |
| 5464950 | Aluminum nitride circuit board and method of producing same | Michio Horiuchi, Koishiro Hayashi | 1995-11-07 |
| 5229213 | Aluminum nitride circuit board | Michio Horiuchi, Yukiharu Takeuchi | 1993-07-20 |