Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886154 | Electrostatic chuck and substrate fixing device | Tatsuro Yoshida | 2021-01-05 |
| 10593573 | Electrostatic chuck and substrate fixing device | Tatsuro Yoshida | 2020-03-17 |
| 10535545 | Substrate fixing device | Yoichi Harayama, Keiichi Takemoto | 2020-01-14 |
| 10361110 | Substrate holding apparatus | Keiichi Takemoto, Yoichi Harayama, Shuzo Aoki | 2019-07-23 |
| 8034188 | Method for cleaning surface of resin layer | Yuji Yukiiri | 2011-10-11 |