Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832533 | Conformal damage-free encapsulation of chalcogenide materials | James S. Sims, Andrew John McKerrow, Meihua Shen, Thorsten Lill, Shane Tang +4 more | 2023-11-28 |
| 11552452 | Semi-polar III-nitride optoelectronic devices on m-plane substrates with miscuts less than +/− 15 degrees in the c-direction | Po Shan Hsu, Robert M. Farrell, Daniel Arthur Haeger, Hiroaki Ohta, Anurag Tyagi +3 more | 2023-01-10 |
| 11239420 | Conformal damage-free encapsulation of chalcogenide materials | James S. Sims, Andrew John McKerrow, Meihua Shen, Thorsten Lill, Shane Tang +4 more | 2022-02-01 |
| 10020188 | Method for depositing ALD films using halide-based precursors | James S. Sims, Jon Henri, Ramesh Chandrasekharan, Andrew John McKerrow, Seshasayee Varadarajan | 2018-07-10 |
| 9917422 | Semi-polar III-nitride optoelectronic devices on M-plane substrates with miscuts less than +/− 15 degrees in the C-direction | Po Shan Hsu, Robert M. Farrell, Daniel Arthur Haeger, Hiroaki Ohta, Anurag Tyagi +3 more | 2018-03-13 |
| 9865455 | Nitride film formed by plasma-enhanced and thermal atomic layer deposition process | James S. Sims | 2018-01-09 |
| 9824884 | Method for depositing metals free ald silicon nitride films using halide-based precursors | James S. Sims, Jon Henri, Ramesh Chandrasekharan, Andrew John McKerrow, Seshasayee Varadarajan | 2017-11-21 |
| 9611987 | White light source employing a III-nitride based laser diode pumping a phosphor | James S. Speck, Nathan A. Pfaff, Steven P. DenBaars | 2017-04-04 |
| 9214333 | Methods and apparatuses for uniform reduction of the in-feature wet etch rate of a silicon nitride film formed by ALD | James S. Sims, Jon Henri, Dennis M. Hausmann | 2015-12-15 |
| 9076646 | Plasma enhanced atomic layer deposition with pulsed plasma exposure | James S. Sims, Jon Henri, Sathish Babu S. V. Janjam, Shane Tang | 2015-07-07 |
| 9077151 | Semi-polar III-nitride optoelectronic devices on M-plane substrates with miscuts less than +/-15 degrees in the C-direction | Po Shan Hsu, Robert M. Farrell, Daniel Arthur Haeger, Hiroaki Ohta, Anurag Tyagi +3 more | 2015-07-07 |