Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8227335 | Forming a copper diffusion barrier | Valery M. Dubin, Michael L. McSwiney, Peter K. Moon | 2012-07-24 |
| 7694413 | Method of making a bottomless via | Chin-Chang Cheng | 2010-04-13 |
| 7605469 | Atomic layer deposited tantalum containing adhesion layer | Kerry Spurgin, Brennan Peterson | 2009-10-20 |
| 7601637 | Atomic layer deposited tantalum containing adhesion layer | Kerry Spurgin, Brennan Peterson | 2009-10-13 |
| 7550385 | Amine-free deposition of metal-nitride films | Adrien LaVoie, Valery M. Dubin, Juan E. Dominguez, Kevin P. O'Brien, John D. Peck +2 more | 2009-06-23 |
| 7459392 | Noble metal barrier and seed layer for semiconductors | Juan E. Dominguez, Michael L. McSwiney | 2008-12-02 |
| 7435679 | Alloyed underlayer for microelectronic interconnects | Juan E. Dominguez | 2008-10-14 |
| 7335587 | Post polish anneal of atomic layer deposition barrier layers | Kevin P. O'Brien, Sridhar Balakrishnan | 2008-02-26 |
| 7279423 | Forming a copper diffusion barrier | Valery M. Dubin, Michael L. McSwiney, Peter K. Moon | 2007-10-09 |
| 7241706 | Low k ILD layer with a hydrophilic portion | Nate Baxter | 2007-07-10 |
| 7220671 | Organometallic precursors for the chemical phase deposition of metal films in interconnect applications | Harsono S. Simka, Juan E. Dominguez, Adrien LaVoie, Kevin P. O'Brien | 2007-05-22 |
| 7071126 | Densifying a relatively porous material | Kevin P. O'Brien | 2006-07-04 |
| 6867473 | Plating a conductive material on a dielectric material | Michael Goodner, Grant Kloster | 2005-03-15 |
| 6682989 | Plating a conductive material on a dielectric material | Michael Goodner, Grant Kloster | 2004-01-27 |
| 6596888 | MOCVD of WNx thin films using imido precursors | Lisa McElwee-White, Timothy J. Anderson, Carlos Ortiz, Omar J. Bchir | 2003-07-22 |
| 6369603 | Radio frequency coupling apparatus and method for measuring minority carrier lifetimes in semiconductor materials | Richard K. Ahrenkiel | 2002-04-09 |
| 6275060 | Apparatus and method for measuring minority carrier lifetimes in semiconductor materials | Richard K. Ahrenkiel | 2001-08-14 |
| 5419462 | Apparatus for recharging a heated receptacle with particulate matter at a controlled velocity | Andrew O. Wikman | 1995-05-30 |
| 4866191 | Stabilization of amine alanes | Everett M. Marlett, Frederick W. Frey, Herbert D. Kaesz | 1989-09-12 |
| 4782171 | Stabilization of amine alanes | Everett M. Marlett, Frederick W. Frey, Herbert D. Kaesz | 1988-11-01 |
| 4730070 | Stabilization of amine alanes | Everett M. Marlett, Frederick W. Frey, Herbert D. Kaesz | 1988-03-08 |