| 8227335 |
Forming a copper diffusion barrier |
Valery M. Dubin, Michael L. McSwiney, Peter K. Moon |
2012-07-24 |
$18,521,000 |
| 7694413 |
Method of making a bottomless via |
Chin-Chang Cheng |
2010-04-13 |
$20,798,000 |
| 7605469 |
Atomic layer deposited tantalum containing adhesion layer |
Kerry Spurgin, Brennan Peterson |
2009-10-20 |
$20,186,000 |
| 7601637 |
Atomic layer deposited tantalum containing adhesion layer |
Kerry Spurgin, Brennan Peterson |
2009-10-13 |
$21,403,000 |
| 7550385 |
Amine-free deposition of metal-nitride films |
Adrien LaVoie, Valery M. Dubin, Juan E. Dominguez, Kevin P. O'Brien, John D. Peck +2 more |
2009-06-23 |
$19,334,000 |
| 7459392 |
Noble metal barrier and seed layer for semiconductors |
Juan E. Dominguez, Michael L. McSwiney |
2008-12-02 |
$16,850,000 |
| 7435679 |
Alloyed underlayer for microelectronic interconnects |
Juan E. Dominguez |
2008-10-14 |
$13,671,000 |
| 7335587 |
Post polish anneal of atomic layer deposition barrier layers |
Kevin P. O'Brien, Sridhar Balakrishnan |
2008-02-26 |
$16,748,000 |
| 7279423 |
Forming a copper diffusion barrier |
Valery M. Dubin, Michael L. McSwiney, Peter K. Moon |
2007-10-09 |
$11,205,000 |
| 7241706 |
Low k ILD layer with a hydrophilic portion |
Nate Baxter |
2007-07-10 |
$14,625,000 |
| 7220671 |
Organometallic precursors for the chemical phase deposition of metal films in interconnect applications |
Harsono S. Simka, Juan E. Dominguez, Adrien LaVoie, Kevin P. O'Brien |
2007-05-22 |
$18,006,000 |
| 7071126 |
Densifying a relatively porous material |
Kevin P. O'Brien |
2006-07-04 |
|
| 6867473 |
Plating a conductive material on a dielectric material |
Michael Goodner, Grant Kloster |
2005-03-15 |
$27,410,000 |
| 6682989 |
Plating a conductive material on a dielectric material |
Michael Goodner, Grant Kloster |
2004-01-27 |
$81,098,000 |
| 6596888 |
MOCVD of WNx thin films using imido precursors |
Lisa McElwee-White, Timothy J. Anderson, Carlos Ortiz, Omar J. Bchir |
2003-07-22 |
|
| 6369603 |
Radio frequency coupling apparatus and method for measuring minority carrier lifetimes in semiconductor materials |
Richard K. Ahrenkiel |
2002-04-09 |
|
| 6275060 |
Apparatus and method for measuring minority carrier lifetimes in semiconductor materials |
Richard K. Ahrenkiel |
2001-08-14 |
|
| 5419462 |
Apparatus for recharging a heated receptacle with particulate matter at a controlled velocity |
Andrew O. Wikman |
1995-05-30 |
$3,747,000 |
| 4866191 |
Stabilization of amine alanes |
Everett M. Marlett, Frederick W. Frey, Herbert D. Kaesz |
1989-09-12 |
$4,414,000 |
| 4782171 |
Stabilization of amine alanes |
Everett M. Marlett, Frederick W. Frey, Herbert D. Kaesz |
1988-11-01 |
$8,331,000 |
| 4730070 |
Stabilization of amine alanes |
Everett M. Marlett, Frederick W. Frey, Herbert D. Kaesz |
1988-03-08 |
$22,913,000 |
