Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6342131 | Method of depositing a multilayer thin film by means of magnetron sputtering which controls the magnetic field | Tomio Katata, Christopher Parks, John Benedict | 2002-01-29 |
| 6268293 | Method of forming wires on an integrated circuit chip | Lawrence A. Clevenger, Greg Costrini, Dave Dobuzinsky, Yoichi Otani, Thomas Rupp | 2001-07-31 |
| 6268299 | Variable stoichiometry silicon nitride barrier films for tunable etch selectivity and enhanced hyrogen permeability | Rajarao Jammy, Johnathan E. Faltermeier, Keitaro Imai, Ryota Katsumata, Jean-Marc Rousseau +1 more | 2001-07-31 |
| 6117778 | Semiconductor wafer edge bead removal method and tool | Bradley P. Jones | 2000-09-12 |
| 6057220 | Titanium polycide stabilization with a porous barrier | Atul Ajmera, Christine Dehm, Anthony G. Domenicucci, George G. Gifford, Stephen K. Loh +1 more | 2000-05-02 |
| 5401677 | Method of metal silicide formation in integrated circuit devices | Robert D. Bailey, Cyril Cabral, Jr., Brian T. Cunningham, Hormazdyar M. Dalal, James M. E. Harper +2 more | 1995-03-28 |