Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9652729 | Metrology management | William K. Hoffman, Timothy L. Holmes, Jonathan Levy, Christopher E. Pepe, Darryl D. Restaino +1 more | 2017-05-16 |
| 8855401 | Methods and systems involving measuring complex dimensions of silicon devices | Charles N. Archie, Anastasios A. Katsetos, Georgios A. Vakas | 2014-10-07 |
| 8467993 | Measurement tool monitoring using fleet measurement precision and tool matching precision analysis | Charles N. Archie, Andrew Brendler, Dmitriy Shneyder | 2013-06-18 |
| 8450120 | SEM repair for sub-optimal features | Stuart A. Sieg, Kourosh Nafisi | 2013-05-28 |
| 8211717 | SEM repair for sub-optimal features | Stuart A. Sieg, Kourosh Nafisi | 2012-07-03 |
| 7881891 | Automated dynamic metrology sampling system and method for process control | Javier Ayala, Marc J. Postiglione | 2011-02-01 |
| 7831395 | Quantification of adsorbed molecular contaminant using thin film measurement | Lin Zhou | 2010-11-09 |
| 7716009 | Metrology tool recipe validator using best known methods | Ejaj Ahmed, Charles N. Archie, Stephen W. Goodrich, Georgios A. Vakas, Erwin E. Weissmann +1 more | 2010-05-11 |
| 7700946 | Structure for reducing prior level edge interference with critical dimension measurement | Alexander L. Martin | 2010-04-20 |
| 7645620 | Method and structure for reducing prior level edge interference with critical dimension measurement | Alexander L. Martin | 2010-01-12 |
| 7571070 | Measurement system fleet optimization | Charles N. Archie, George W. Banke, Jr. | 2009-08-04 |
| 7532999 | Determining root cause of matching problem and/or fleet measurement precision problem for measurement system | Charles N. Archie, George W. Banke, Jr. | 2009-05-12 |
| 7485859 | Charged beam apparatus and method that provide charged beam aerial dimensional map | Lin Zhou | 2009-02-03 |
| 7487054 | Automated dynamic metrology sampling system and method for process control | Javier Ayala, Marc J. Postiglione | 2009-02-03 |
| 7479396 | Structure, system and method for dimensionally unstable layer dimension measurement | Lin Zhou | 2009-01-20 |
| 7467063 | Determining fleet matching problem and root cause issue for measurement system | Charles N. Archie, George W. Banke, Jr. | 2008-12-16 |
| 7397252 | Measurement of critical dimension and quantification of electron beam size at real time using electron beam induced current | Lin Zhou | 2008-07-08 |
| 7369947 | Quantification of adsorbed molecular contaminant using thin film measurement | Lin Zhou | 2008-05-06 |
| 7358130 | Method for monitoring lateral encroachment of spacer process on a CD SEM | Bachir Dirahoui, Renee T. Mo, Ravikumar Ramachandran | 2008-04-15 |
| 7353128 | Measurement system optimization | Charles N. Archie, George W. Banke, Jr. | 2008-04-01 |
| 7340374 | Determining fleet matching problem and root cause issue for measurement system | Charles N. Archie, George W. Banke, Jr. | 2008-03-04 |
| 7305320 | Metrology tool recipe validator using best known methods | Ejaj Ahmed, Charles N. Archie, Stephen W. Goodrich, Georgios A. Vakas, Erwin E. Weissmann +1 more | 2007-12-04 |
| 7187993 | Metrology tool error log analysis methodology and system | Sarah A. Kay, Lin Zhou | 2007-03-06 |
| 7105398 | Method for monitoring lateral encroachment of spacer process on a CD SEM | Bachir Dirahoui, Renee T. Mo, Ravikumar Ramachandran | 2006-09-12 |
| 7065425 | Metrology tool error log analysis methodology and system | Sarah A. Kay, Lin Zhou | 2006-06-20 |