Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7881891 | Automated dynamic metrology sampling system and method for process control | Javier Ayala, Eric P. Solecky | 2011-02-01 |
| 7519216 | Systems and methods of maintaining equipment for manufacturing semiconductor devices | James V. Iannucci | 2009-04-14 |
| 7487054 | Automated dynamic metrology sampling system and method for process control | Javier Ayala, Eric P. Solecky | 2009-02-03 |
| 6456953 | Method for correcting misalignment between a reticle and a stage in a step-and-repeat exposure system | Neil J. Peruffo | 2002-09-24 |