Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7187993 | Metrology tool error log analysis methodology and system | Eric P. Solecky, Lin Zhou | 2007-03-06 |
| 7065425 | Metrology tool error log analysis methodology and system | Eric P. Solecky, Lin Zhou | 2006-06-20 |