Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6789033 | Apparatus and method for characterizing features at small dimensions | Charles N. Archie | 2004-09-07 |
| 6407396 | Wafer metrology structure | Rebecca D. Mih, Donald C. Wheeler | 2002-06-18 |
| 6185323 | Method characterizing a feature using measurement imaging tool | Charles N. Archie | 2001-02-06 |
| 6025600 | Method for astigmatism correction in charged particle beam systems | Charles N. Archie, Steven R. Rogers | 2000-02-15 |
| 5969273 | Method and apparatus for critical dimension and tool resolution determination using edge width | Charles N. Archie, Mark E. Lagus, Diana Nyyssonen, deceased, by Jeffrey Swing, executor, Donald C. Wheeler | 1999-10-19 |