Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6128089 | Combined segmented and nonsegmented bar-in-bar targets | Christopher P. Ausschnitt, by Jeffrey Swing, executor | 2000-10-03 |
| 5969273 | Method and apparatus for critical dimension and tool resolution determination using edge width | Charles N. Archie, Mark E. Lagus, by Jeffrey Swing, executor, Eric P. Solecky, Donald C. Wheeler | 1999-10-19 |
| 5633714 | Preprocessing of image amplitude and phase data for CD and OL measurement | — | 1997-05-27 |
| 5186041 | Microprobe-based CD measurement tool | — | 1993-02-16 |