ML

Mark E. Lagus

IBM: 5 patents #18,733 of 70,183Top 30%
Overall (All Time): #1,020,003 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8340800 Monitoring a process sector in a production facility William J. Cote, Michael P. Guse, James Rice, Yunsheng Song 2012-12-25
6656369 Method for fabricating a scanning probe microscope probe Mahadevaiyer Krishnan, Kevin S. Petrarca, James G. Ryan, Richard P. Volant 2003-12-02
6004706 Etching parameter control system process Christopher P. Ausschnitt, Timothy A. Brunner 1999-12-21
5969273 Method and apparatus for critical dimension and tool resolution determination using edge width Charles N. Archie, Diana Nyyssonen, deceased, by Jeffrey Swing, executor, Eric P. Solecky, Donald C. Wheeler 1999-10-19
5965309 Focus or exposure dose parameter control system using tone reversing patterns Christopher P. Ausschnitt, Timothy A. Brunner 1999-10-12