Issued Patents All Time
Showing 76–100 of 113 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8452076 | Defect classifier using classification recipe based on connection between rule-based and example-based classifiers | Ryo Nakagaki, Masaki Kurihara | 2013-05-28 |
| 8405025 | Scanning electron microscope and method for detecting an image using the same | Hiroshi Makino | 2013-03-26 |
| 8150141 | Defect classifier using classification recipe based on connection between rule-based and example-based classifiers | Ryo Nakagaki, Masaki Kurihara | 2012-04-03 |
| 8121395 | Inspection apparatus and an inspection method for inspecting a circuit pattern | Takashi Hiroi, Takeyuki Yoshida, Naoki Hosoya | 2012-02-21 |
| 8106357 | Scanning electron microscope and method for processing an image obtained by the scanning electron microscope | Kenji Nakahira, Atsushi Miyamoto | 2012-01-31 |
| 8093557 | Method and apparatus for reviewing defects | Hidetoshi Nishiyama, Sachio Uto | 2012-01-10 |
| 8090190 | Method and apparatus for reviewing defects | Ryo Nakagaki | 2012-01-03 |
| 7991217 | Defect classifier using classification recipe based on connection between rule-based and example-based classifiers | Ryo Nakagaki, Masaki Kurihara | 2011-08-02 |
| 7903867 | Method and apparatus for displaying detected defects | Kenji Nakahira | 2011-03-08 |
| 7873205 | Apparatus and method for classifying defects using multiple classification modules | Hirohito Okuda, Yuji Takagi, Atsushi Miyamoto, Takehiro Hirai | 2011-01-18 |
| 7873202 | Method and apparatus for reviewing defects of semiconductor device | Masaki Kurihara, Ryo Nakagaki | 2011-01-18 |
| 7834317 | Scanning electron microscope and system for inspecting semiconductor device | Ryo Nakagaki | 2010-11-16 |
| 7764826 | Method and apparatus of reviewing defects on a semiconductor device | Atsushi Miyamoto | 2010-07-27 |
| 7756320 | Defect classification using a logical equation for high stage classification | Atsushi Miyamoto, Hirohito Okuda | 2010-07-13 |
| 7734082 | Defect inspection method | Hirohito Okuda | 2010-06-08 |
| 7657078 | Method and apparatus for reviewing defects | Ryo Nakagaki | 2010-02-02 |
| 7656171 | Method and apparatus for reviewing defects by detecting images having voltage contrast | Takehiro Hirai | 2010-02-02 |
| 7626163 | Defect review method and device for semiconductor device | — | 2009-12-01 |
| 7601954 | Method and apparatus for reviewing defects | Hidetoshi Nishiyama, Sachio Uto | 2009-10-13 |
| 7602962 | Method of classifying defects using multiple inspection machines | Atsushi Miyamoto, Hirohito Okuda, Yuji Takagi, Takashi Hiroi | 2009-10-13 |
| 7598490 | SEM-type reviewing apparatus and a method for reviewing defects using the same | Masaki Kurihara, Ryo Nakagaki | 2009-10-06 |
| 7598491 | Observing method and its apparatus using electron microscope | Munenori Fukunishi, Yuuji Takagi | 2009-10-06 |
| 7583832 | Method and its apparatus for classifying defects | Hirohito Okuda, Yuji Takagi, Atsushi Miyamoto | 2009-09-01 |
| 7449898 | Method and apparatus for reviewing defects by detecting images having voltage contrast | Takehiro Hirai | 2008-11-11 |
| 7432503 | Scanning electron microscope and method for detecting an image using the same | Hiroshi Makino | 2008-10-07 |