Issued Patents All Time
Showing 176–200 of 600 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7268404 | Device having a silicon oxide film containing krypton | — | 2007-09-11 |
| 7258845 | Apparatus and reactor for generating and feeding high purity moisture | Nobukazu Ikeda, Yukio Minami, Kouji Kawada, Katunori Komehana, Teruo Honiden +6 more | 2007-08-21 |
| 7258725 | Gas supplying method and system | Yoshio Ishihara, Akihiro Nakamura | 2007-08-21 |
| 7239084 | Organic EL device and liquid crystal display | Yoshifumi Kato, Shigetoshi Sugawa, Akihiro Morimoto | 2007-07-03 |
| 7225754 | Plasma processing apparatus including a plurality of plasma processing units having reduced variation | Akira Nakano | 2007-06-05 |
| 7219533 | Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method | Masaaki Nagase, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura, Tomio Uno +1 more | 2007-05-22 |
| 7202534 | Complementary MIS device | Koji Kotani, Shigetoshi Sugawa | 2007-04-10 |
| 7193434 | Semiconductor integrated circuit | Koji Kotani, Kazuyuki Maruo, Takahiro Yamaguchi | 2007-03-20 |
| 7185421 | Method and apparatus for manufacturing multilayer printed wiring board | Hidetoshi Murakami | 2007-03-06 |
| 7179746 | Method of surface treatment for manufacturing semiconductor device | Shigetoshi Sugawa, Akinobu Teramoto, Hiroshi Akahori, Keiichi Nii | 2007-02-20 |
| 7150444 | Valve with an integral orifice | Kouji Nishino, Nobukazu Ikeda, Michio Yamaji, Ryousuke Dohi, Eiji Ideta +1 more | 2006-12-19 |
| 7140647 | Fluid coupling | Michio Yamaji, Shinya Nojima, Yukito Katsumi, Tsutomu Shinohara | 2006-11-28 |
| 7141756 | Microwave plasma processing apparatus, plasma ignition method, plasma forming method, and plasma processing method | Masaki Hirayama, Shigetoshi Sugawa, Tetsuya Goto | 2006-11-28 |
| 7120556 | Performance evaluation method for plasma processing apparatus for continuously maintaining a desired performance level | Akira Nakano | 2006-10-10 |
| 7115184 | Plasma processing device | Masaki Hirayama, Shigetoshi Sugawa, Tetsuya Goto | 2006-10-03 |
| 7109083 | Flash memory device and a fabrication process thereof, method of forming a dielectric film | Shigetoshi Sugawa | 2006-09-19 |
| 7103990 | Rotary silicon wafer cleaning apparatus | Yasuyuki Shirai, Takumi Fujita, Yukio Minami, Nobukazu Ikeda, Akihiro Morimoto +1 more | 2006-09-12 |
| 7097735 | Plasma processing device | Masaki Hirayama, Shigetoshi Sugawa, Tetsuya Goto | 2006-08-29 |
| 7095178 | Plasma processing apparatus, method for operating the same, designing system of matching circuit, and plasma processing method | Akira Nakano, Tadashi Kumagai, Tomofumi Oba | 2006-08-22 |
| 7085628 | Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus | Tomio Uno, Osamu Nakamura, Nobukazu Ikeda, Ryousuke Dohi, Kouji Nishino +2 more | 2006-08-01 |
| 7083701 | Device and method for plasma processing, and slow-wave plate | Masaki Hirayama, Shigetoshi Sugawa, Tetsuya Goto | 2006-08-01 |
| 7080658 | Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method | Nobukazu Ikeda, Kouji Nishino, Masaaki Nagase, Kyousuke Dohi, Ryutaro Nishimura | 2006-07-25 |
| 7052974 | Bonded wafer and method of producing bonded wafer | Kiyoshi Mitani, Kiyoshi Demizu, Isao Yokokawa, Shigetoshi Sugawa | 2006-05-30 |
| 7026681 | Flash memory device and fabrication process thereof, method of forming a dielectric film | Shigetoshi Sugawa | 2006-04-11 |
| 7012311 | Semiconductor device formed on (111) surface of a Si crystal and fabrication process thereof | Shigetoshi Sugawa, Katsuyuki Sekine, Yuji Saito | 2006-03-14 |