Issued Patents All Time
Showing 226–250 of 600 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6846753 | Flash memory device and a fabrication process thereof, method of forming a dielectric film | Shigetoshi Sugawa | 2005-01-25 |
| 6847672 | Laser gas supply path structure in an exposure apparatus | Hiroshi Osawa, Nobuyoshi Tanaka, Kazuhide Ino, Toshikuni Shinohara, Yasuyuki Shirai +1 more | 2005-01-25 |
| 6838394 | Flash memory device and a fabrication process thereof, method of forming a dielectric film | Shigetoshi Sugawa | 2005-01-04 |
| 6830652 | Microwave plasma processing apparatus | Masaki Hirayama | 2004-12-14 |
| 6829279 | Laser oscillating apparatus, exposure apparatus using the same and device fabrication method | Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2004-12-07 |
| 6820632 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino, Ryousuke Dohi +13 more | 2004-11-23 |
| 6821452 | Etchant | Hirohisa Kikuyama, Masayuki Miyashita, Tatsuhiro Yabune | 2004-11-23 |
| 6818320 | Welding method for welded members subjected to fluoride passivation treatment, fluoride passivation retreatment method, and welded parts | Takahisa Nitta, Yasuyuki Shirai, Osamu Nakamura | 2004-11-16 |
| 6818852 | Microwave plasma processing device, plasma processing method, and microwave radiating member | Masaki Hirayama, Tetsuya Goto | 2004-11-16 |
| 6815720 | Substrate having buried structure, display device including the substrate, method of making the substrate and method for fabricating the display device | Kazuki Kobayashi, Kimiaki Fujino, Ikuo Sakono, Shigetoshi Sugawa, Akihiro Morimoto | 2004-11-09 |
| 6806438 | Plasma processing apparatus including a plurality of plasma processing units having reduced variation | Akihiro Nakano | 2004-10-19 |
| 6804285 | Gas supply path structure for a gas laser | Hiroshi Osawa, Nobuyoshi Tanaka, Kazuhide Ino, Toshikuni Shinohara, Yasuyuki Shirai +1 more | 2004-10-12 |
| 6801554 | Laser oscillating apparatus, exposure apparatus, and device fabrication method | Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2004-10-05 |
| 6797194 | Surface treating for micromachining and method for surface treatment | Hirohisa Kikuyama, Masayuki Miyashita, Tatsuhiro Yabune | 2004-09-28 |
| 6795796 | Performance evaluation method for plasma processing apparatus for continuously maintaining a desired performance level | Akira Nakano | 2004-09-21 |
| 6792889 | Plasma processing apparatus and method capable of performing uniform plasma treatment by control of excitation power | Akira Nakano | 2004-09-21 |
| 6783628 | Plasma processing apparatus | Naoko Yamamoto, Tatsushi Yamamoto, Masaki Hirayama | 2004-08-31 |
| 6753496 | Plasma processing apparatus | Takamitsu Tadera, Tatsushi Yamamoto, Masaki Hirayama | 2004-06-22 |
| 6750614 | Plasma processing apparatus capable of performing uniform plasma treatment by preventing drift in plasma discharge current | Akira Nakano | 2004-06-15 |
| 6748751 | Air cooling device and air cooling method | Yasuyuki Shirai, Sadao Kobayashi, Isao Terada, Toshihisa Okabe, Takashi Taniguchi +7 more | 2004-06-15 |
| 6744802 | Laser oscillating apparatus with slotted waveguide | Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2004-06-01 |
| 6736606 | Vacuum apparatus | Masaki Hirayama | 2004-05-18 |
| 6733732 | Reactor for generating moisture | Koji Kawada, Yoshikazu Tanabe, Takahisa Nitta, Nobukazu Ikeda, Akihiro Morimoto +3 more | 2004-05-11 |
| 6728745 | Semiconductor circuit for arithmetic operation and method of arithmetic operation | Makoto Imai, Toshiyuki Nozawa, Masanori Fujibayashi, Koji Kotani, Tadashi Shibata +1 more | 2004-04-27 |
| 6726814 | Process for producing optical article | Kazuyuki Harada, Nobuyoshi Tanaka | 2004-04-27 |