Issued Patents All Time
Showing 126–150 of 600 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7764355 | Substrate stage and heat treatment apparatus | Yusuke Muraoka, Yasuyoshi Miyaji, Yasushi Nagashima | 2010-07-27 |
| 7759762 | Semiconductor device formed on (111) surface of a Si crystal and fabrication process thereof | Shigetoshi Sugawa, Katsuyuki Sekine, Yuji Saito | 2010-07-20 |
| 7744836 | Gas purifying process and device | Ryuichi Yazaki, Masato Kawai, Tetsuya Kimijima, Kunio Matsuda | 2010-06-29 |
| 7744356 | Screw vacuum pump with male and female screw rotors having unequal leads | — | 2010-06-29 |
| 7723637 | Plasma processing apparatus | Masaki Hirayama, Takahiro Horiguchi | 2010-05-25 |
| 7718484 | Method of forming a dielectic film that contains silicon, oxygen and nitrogen and method of fabricating a semiconductor device that uses such a dielectric film | Shigetoshi Sugawa, Masaki Hirayama, Yasuyuki Shirai | 2010-05-18 |
| 7704893 | Semiconductor device, method for manufacturing semiconductor device and gas for plasma CVD | Yasuo Kobayashi, Kohei Kawamura, Akinobu Teramoto, Tatsuya Sugimoto, Toshiro Yamada +1 more | 2010-04-27 |
| 7691725 | Method for manufacturing semiconductor device | Akinobu Teramoto | 2010-04-06 |
| 7686600 | Vaccum pump having shaft seal to prevent corrosion and to ensure smooth operation | — | 2010-03-30 |
| 7673649 | Vacuum thermal insulating valve | Yukio Minami, Kenji Tubota, Tsutomu Shinohara, Michio Yamaji, Nobukazu Ikeda +3 more | 2010-03-09 |
| 7670454 | Plasma processing apparatus | Masaki Hirayama, Shigetoshi Sugawa, Tetsuya Goto | 2010-03-02 |
| 7669455 | Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device | Kazuhiko Sugiyama, Shoichi Hino, Eiji Takahashi, Makoto Saegusa, Nobukazu Ikeda +4 more | 2010-03-02 |
| 7667276 | Semiconductor integrated circuit switch matrix | Koji Kotani, Kazuyuki Maruo, Takahiro Yamaguchi | 2010-02-23 |
| 7663734 | Pattern writing system and pattern writing method | Shigetoshi Sugawa, Kimio Yanagida, Kiwamu Takehisa | 2010-02-16 |
| 7663195 | P-channel power MIS field effect transistor and switching circuit | Akinobu Teramoto, Hiroshi Akahori, Keiichi Nii, Takanori Watanabe | 2010-02-16 |
| 7637726 | Screw vacuum pump | — | 2009-12-29 |
| 7595087 | Process of forming platinum coating catalyst layer in moisture-generating reactor | Nobukazu Ikeda, Akihiro Morimoto, Masafumi Kitano, Yukio Minami, Koji Kawada | 2009-09-29 |
| 7582569 | Distributor and distributing method, plasma processing system and method, and process for fabricating LCD | Naohisa Goto, Nobuhiro Kuga, Akihiko Hiroe | 2009-09-01 |
| 7566936 | Complementary MIS device | Koji Kotani, Shigetoshi Sugawa | 2009-07-28 |
| 7553459 | Apparatus and reactor for generating and feeding high purity moisture | Nobukazu Ikeda, Yukio Minami, Kouji Kawada, Katunori Komehana, Teruo Honiden +6 more | 2009-06-30 |
| 7538012 | Fluorine-containing carbon film forming method | Masaki Hirayama | 2009-05-26 |
| 7528074 | Method of manufacturing a semiconductor device and method of etching an insulating film | Tetsuya Goto | 2009-05-05 |
| 7521324 | Semiconductor device and method for manufacturing the same | Akinobu Teramoto, Hidetoshi Wakamatsu, Yasuo Kobayashi | 2009-04-21 |
| 7520245 | Plasma processing apparatus | Masaki Hirayama | 2009-04-21 |
| 7501764 | Fluorescent lamp and method of manufacturing same | Yasuyuki Shirai, Akihiro Morimoto | 2009-03-10 |