Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7764355 | Substrate stage and heat treatment apparatus | Tadahiro Ohmi, Yusuke Muraoka, Yasuyoshi Miyaji | 2010-07-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7764355 | Substrate stage and heat treatment apparatus | Tadahiro Ohmi, Yusuke Muraoka, Yasuyoshi Miyaji | 2010-07-27 |