Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8657922 | Pressure swing adsorption-type gas separation method and separation apparatus | Masaya Yamawaki, Tadanobu Arimura | 2014-02-25 |
| 7976806 | Granular material comprising porous particles containing calcium and/or magnesium | Osamu Misumi, Shinichi Yamamoto, Takayuki Watanabe, Takashi Kishimoto, Takashi Watanabe +3 more | 2011-07-12 |
| 7594955 | Process for recovering rare gases using gas-recovering container | — | 2009-09-29 |
| 7258725 | Gas supplying method and system | Tadahiro Ohmi, Akihiro Nakamura | 2007-08-21 |
| 7258909 | Leather-like sheet for balls | Kazundo Akamata | 2007-08-21 |
| 7033843 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Hiroyuki Hasegawa, Tomonori Yamaoka, Hiroshi Masusaki | 2006-04-25 |
| 6887721 | Method of purging CVD apparatus and method for judging maintenance of times of semiconductor production apparatuses | Hiroyuki Hasegawa, Tomonori Yamaoka, Hiroshi Masusaki, Takayuki Satou, Katsumasa Suzuki +1 more | 2005-05-03 |
| 6869579 | Process for treating exhaust gas | Tadahiro Ohmi | 2005-03-22 |
| 6794204 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Hiroyuki Hasegawa, Tomonori Yamaoka, Hiroshi Masusaki | 2004-09-21 |
| 6776805 | Semiconductor manufacturing apparatus having a moisture measuring device | Hiroyuki Hasegawa, Tomonori Yamaoka, Hiroshi Masusaki | 2004-08-17 |
| 6605134 | Method and apparatus for collecting rare gas | Shigeru Hayashida, Toru Nagasaka, Tetsuya Kimijima, Tadahiro Ohmi | 2003-08-12 |
| 6519039 | Gas spectrochemical analyzer, and spectrochemical analyzing method | Jun-ichi Morishita, Shang-Qian Wu | 2003-02-11 |
| 6375911 | Method and device for treating exhaust gas | Tadahiro Ohmi, Koh Matsumoto, Tetsuya Kimijima | 2002-04-23 |
| 6343239 | Transportation method for substrate wafers and transportation apparatus | Masayuki Toda, Tadahiro Ohmi | 2002-01-29 |
| 6312328 | System and method for producing and supplying highly clean dry air | Daiji Nakajima, Tadahiro Ohmi | 2001-11-06 |
| 6240610 | Wafer and transport system | Masayuki Toda, Tadahiro Ohmi | 2001-06-05 |
| 6217633 | Method and apparatus for recovering rare gas | Tadahiro Ohmi | 2001-04-17 |
| 6040915 | Analysis method for gases and apparatus therefor | Shang-Qian Wu, Jun-ichi Morishita, Tetsuya Kimijima | 2000-03-21 |
| 5953591 | Process for laser detection of gas and contaminants in a wafer transport gas tunnel | Masayuki Toda, Tadahiro Ohmi | 1999-09-14 |
| 5821537 | Infrared spectroscopic analysis method for gases and device employing the method therein | Hiroshi Masusaki, Shang-Qian Wu, Koh Matsumoto | 1998-10-13 |
| 5766321 | Apparatus for reducing dissolved oxygen | Hiroshi Yamazaki, Sumiyo Yamane, Koh Matsumoto | 1998-06-16 |
| 5759214 | Nitrogen gas supply system | Tadahiro Ohmi | 1998-06-02 |
| 5703365 | Infrared spectroscopic analysis method for gases and device employing the method therein | Hiroshi Masusaki, Shang-Qian Wu, Koh Matsumoto | 1997-12-30 |
| 5444379 | Electric conductivity measuring cell | Tadahiro Ohmi, Ryosuke Fukushima | 1995-08-22 |
| 5414361 | Method of measuring very small quantity of impurity in gas | Tadahiro Ohmi, Ryosuke Fukushima | 1995-05-09 |