Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11925896 | Gas separation method and gas separation device | — | 2024-03-12 |
| 10559459 | Method for producing silicon nitride film and silicon nitride film | Hiroshi Taka, Shoichi Murakami, Masayasu Hatashita | 2020-02-11 |
| 10280084 | Silicon nitride film and method of making thereof | Shoichi Murakami, Masayasu Hatashita, Hiroshi Taka | 2019-05-07 |
| 8657922 | Pressure swing adsorption-type gas separation method and separation apparatus | Yoshio Ishihara, Tadanobu Arimura | 2014-02-25 |