Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10559459 | Method for producing silicon nitride film and silicon nitride film | Masaya Yamawaki, Shoichi Murakami, Masayasu Hatashita | 2020-02-11 |
| 10280084 | Silicon nitride film and method of making thereof | Shoichi Murakami, Masayasu Hatashita, Masaya Yamawaki | 2019-05-07 |