Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10559459 | Method for producing silicon nitride film and silicon nitride film | Hiroshi Taka, Masaya Yamawaki, Shoichi Murakami | 2020-02-11 |
| 10280084 | Silicon nitride film and method of making thereof | Shoichi Murakami, Hiroshi Taka, Masaya Yamawaki | 2019-05-07 |
| 9117660 | Apparatus, method and program for manufacturing nitride film | Shoichi Murakami | 2015-08-25 |
| 8673781 | Plasma etching method | Akimitsu Oishi, Shoichi Murakami | 2014-03-18 |
| 8598049 | Deposition method | Akimitsu Oishi, Shoichi Murakami | 2013-12-03 |