Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8859434 | Etching method | Shoichi Murakami | 2014-10-14 |
| 8673781 | Plasma etching method | Shoichi Murakami, Masayasu Hatashita | 2014-03-18 |
| 8598049 | Deposition method | Masayasu Hatashita, Shoichi Murakami | 2013-12-03 |