Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12139788 | Cleaning apparatus for component for semiconductor production apparatus, cleaning method for component of semiconductor production apparatus, and cleaning system for component of semiconductor production apparatus | Akira Yamaguchi | 2024-11-12 |
| 8657922 | Pressure swing adsorption-type gas separation method and separation apparatus | Masaya Yamawaki, Yoshio Ishihara | 2014-02-25 |