Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7033843 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Hiroyuki Hasegawa, Tomonori Yamaoka, Yoshio Ishihara | 2006-04-25 |
| 6887721 | Method of purging CVD apparatus and method for judging maintenance of times of semiconductor production apparatuses | Hiroyuki Hasegawa, Tomonori Yamaoka, Yoshio Ishihara, Takayuki Satou, Katsumasa Suzuki +1 more | 2005-05-03 |
| 6800855 | Spectroscopic method for analyzing isotopes by using a semiconductor laser | Jie Dong, Katsumasa Suzuki, Koh Matsumoto | 2004-10-05 |
| 6794204 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Hiroyuki Hasegawa, Tomonori Yamaoka, Yoshio Ishihara | 2004-09-21 |
| 6776805 | Semiconductor manufacturing apparatus having a moisture measuring device | Hiroyuki Hasegawa, Tomonori Yamaoka, Yoshio Ishihara | 2004-08-17 |
| 6636316 | Spectroscopic method for analyzing a gas by using laser beam | Koh Matsumoto, Jie Dong, Katsumasa Suzuki | 2003-10-21 |
| 6491758 | CVD apparatus equipped with moisture monitoring | Hiroyuki Hasegawa, Tomonori Yamaoka, Takayuki Satou, Katsumasa Suzuki, Hiroki Tokunaga | 2002-12-10 |
| 6483589 | Laser spectroscopy system | Katsumasa Suzuki, Takayuki Satoh | 2002-11-19 |
| 5821537 | Infrared spectroscopic analysis method for gases and device employing the method therein | Yoshio Ishihara, Shang-Qian Wu, Koh Matsumoto | 1998-10-13 |
| 5703365 | Infrared spectroscopic analysis method for gases and device employing the method therein | Yoshio Ishihara, Shang-Qian Wu, Koh Matsumoto | 1997-12-30 |