Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8900364 | High productivity vapor processing system | — | 2014-12-02 |
| 8851010 | Systems and methods for measuring, monitoring and controlling ozone concentration | ShouQian Shao, Jay DeDontney | 2014-10-07 |
| 8733280 | Showerhead for processing chamber | Lipyeow Yap, Jay DeDontney, ShouQian Shao | 2014-05-27 |
| 8609519 | Combinatorial approach for screening of ALD film stacks | Albert S. Lee, Tony P. Chiang | 2013-12-17 |
| 8592241 | Method for packaging an electronic device assembly having a capped device interconnect | Scott M. Hayes | 2013-11-26 |
| 8216918 | Method of forming a packaged semiconductor device | Zhiwei Gong, Scott M. Hayes, George R. Leal, Douglas G. Mitchell, Jianwen Xu | 2012-07-10 |
| 7892950 | Methodology for processing a panel during semiconductor device fabrication | Alan J. Magnus, Justin E. Poarch | 2011-02-22 |
| 7845308 | Systems incorporating microwave heaters within fluid supply lines of substrate processing chambers and methods for use of such systems | Jason Stephen Corneille, Nancy E. Gilbert, Robert Tas, Steven Flanders, Timothy Joseph Franklin +2 more | 2010-12-07 |
| 6832950 | Polishing pad with window | Andreas Norbert Wiswesser, Boguslaw A. Swedek | 2004-12-21 |