Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488845 | Substrate processing apparatus | Cha-young Yoo, Kyu Jin Choi, Ja Dae Ku, Jun Young Kim, Bong Ju Jung +3 more | 2022-11-01 |
| 11242601 | Showerhead and substrate processing apparatus including the same | Chan-Yong Park, Jae Ho Lee, Gil Sun Jang, Chang Hoon Yun, Han June Lim +1 more | 2022-02-08 |
| 10840118 | Substrate processing apparatus and method for assembling tube assembly | Cha-young Yoo, Kyu Jin Choi, Ja Dae Ku, Jun Young Kim, Bong Ju Jung +3 more | 2020-11-17 |
| 10793949 | Substrate processing apparatus and substrate processing method using the same | Jun Jin Hyon, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Chang Dol KIM +2 more | 2020-10-06 |
| 10741396 | Substrate processing apparatus | Woo Duck JUNG, Kyu Jin Choi, Seong Min HAN | 2020-08-11 |
| 10622228 | Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit | Dong Keun Lee, Kyung-Jin Chu, Il-Kwang Yang | 2020-04-14 |
| 10593545 | Method for substrate processing using exhaust ports | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2020-03-17 |
| 10364494 | Substrate processing apparatus | Cha-young Yoo, Kyu Jin Choi, Ja Dae Ku, Jun Young Kim, Bong Ju Jung +3 more | 2019-07-30 |
| 10337103 | Substrate processing apparatus | Jun Jin Hyon, Byoung-Gyu Song, Yong-Ki Kim, Kyoung-Hun Kim, Chang Dol KIM +2 more | 2019-07-02 |
| 10287687 | Substrate processing device | Jae Ho Lee, Sang Ho Choi, Seung Hyun YOON | 2019-05-14 |
| 10199225 | Substrate processing apparatus | Woo Duck JUNG, Kyu Jin Choi, Seong Min HAN | 2019-02-05 |
| 10192760 | Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit | Dong Keun Lee, Kyung-Jin Chu, Il-Kwang Yang | 2019-01-29 |
| 10161036 | Substrate processing apparatus | Jun Jin Hyon, Byoung-Gyu Song, Yong-Ki Kim, Kyoung-Hun Kim, Chang Dol KIM +2 more | 2018-12-25 |
| 10145012 | Substrate processing apparatus and substrate processing method | Gil Sun Jang, Chang Hoon Yun, Kyong-Hun Kim | 2018-12-04 |
| 9953850 | Substrate processing apparatus including heat-shield plate | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2018-04-24 |
| 9875895 | Substrate processing apparatus including exhaust ports and substrate processing method | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2018-01-23 |
| 9758870 | Substrate treatment apparatus, and method for controlling temperature of heater | Il-Kwang Yang, Jae Ho Lee, Kyong-Hun Kim, Myung-In Kim, Yang-Sik Shin | 2017-09-12 |
| 9620395 | Apparatus for processing substrate for supplying reaction gas having phase difference | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2017-04-11 |
| 9593415 | Substrate processing apparatus including auxiliary gas supply port | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2017-03-14 |
| 9416451 | Substrate processing device equipped with semicircle shaped antenna | Il-Kwang Yang, Byung Gyu Song, Song Hwan Park | 2016-08-16 |
| 8771418 | Substrate-processing apparatus and substrate-processing method for selectively inserting diffusion plates | Chan-Yong Park, Kyoung-Hun Kim | 2014-07-08 |
| 8528499 | Substrate processing apparatus and method | Il-Kwang Yang, Chan-Yong Park | 2013-09-10 |