Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622228 | Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit | Dong Keun Lee, Kyung-Jin Chu, Sung Tae Je | 2020-04-14 |
| 10593545 | Method for substrate processing using exhaust ports | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2020-03-17 |
| 10192760 | Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit | Dong Keun Lee, Kyung-Jin Chu, Sung Tae Je | 2019-01-29 |
| 9953850 | Substrate processing apparatus including heat-shield plate | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2018-04-24 |
| 9875895 | Substrate processing apparatus including exhaust ports and substrate processing method | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2018-01-23 |
| 9869019 | Substrate processing apparatus including processing unit | Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2018-01-16 |
| 9758870 | Substrate treatment apparatus, and method for controlling temperature of heater | Sung Tae Je, Jae Ho Lee, Kyong-Hun Kim, Myung-In Kim, Yang-Sik Shin | 2017-09-12 |
| 9644895 | Heater moving type substrate processing apparatus | Byoung-Gyu Song, Kyong-Hun Kim, Yong-Ki Kim, Yang-Sik Shin | 2017-05-09 |
| 9620395 | Apparatus for processing substrate for supplying reaction gas having phase difference | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2017-04-11 |
| 9593418 | Showerhead having cooling system and substrate processing apparatus including the showerhead | Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2017-03-14 |
| 9593415 | Substrate processing apparatus including auxiliary gas supply port | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2017-03-14 |
| 9564294 | Plasma treatment apparatus and plasma antenna | Sang Ho Woo, Byung Gyu Song | 2017-02-07 |
| 9416451 | Substrate processing device equipped with semicircle shaped antenna | Sung Tae Je, Byung Gyu Song, Song Hwan Park | 2016-08-16 |
| 9368380 | Substrate processing device with connection space | Byoung-Gyu Song, Kyong-Hun Kim, Yong-Ki Kim, Yang-Sik Shin | 2016-06-14 |
| 8528499 | Substrate processing apparatus and method | Sung Tae Je, Chan-Yong Park | 2013-09-10 |
| 8312840 | Substrate processing apparatus and method | — | 2012-11-20 |