Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392554 | Apparatus for processing a substrate and method of operating the same | Min Jin JUNG, Tae Hwan Kim, Min Woong KANG, Hyun Jun Yoo, Sung Ho Kang +4 more | 2025-08-19 |
| 10392702 | Substrate processing apparatus | Woo Duck JUNG, Kyu Jin Choi, Seong Min HAN, Sung Ha CHOI | 2019-08-27 |
| 9416451 | Substrate processing device equipped with semicircle shaped antenna | Sung Tae Je, Il-Kwang Yang, Byung Gyu Song | 2016-08-16 |