Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9564294 | Plasma treatment apparatus and plasma antenna | Sang Ho Woo, Il-Kwang Yang | 2017-02-07 |
| 9416451 | Substrate processing device equipped with semicircle shaped antenna | Sung Tae Je, Il-Kwang Yang, Song Hwan Park | 2016-08-16 |