Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793949 | Substrate processing apparatus and substrate processing method using the same | Jun Jin Hyon, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Chang Dol KIM +2 more | 2020-10-06 |
| 10593545 | Method for substrate processing using exhaust ports | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2020-03-17 |
| 10229845 | Substrate treatment apparatus | Jun Jin Hyon, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin, Chang Dol KIM | 2019-03-12 |
| 10145012 | Substrate processing apparatus and substrate processing method | Sung Tae Je, Gil Sun Jang, Chang Hoon Yun | 2018-12-04 |
| 9953850 | Substrate processing apparatus including heat-shield plate | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2018-04-24 |
| 9875895 | Substrate processing apparatus including exhaust ports and substrate processing method | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2018-01-23 |
| 9869019 | Substrate processing apparatus including processing unit | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2018-01-16 |
| 9758870 | Substrate treatment apparatus, and method for controlling temperature of heater | Sung Tae Je, Il-Kwang Yang, Jae Ho Lee, Myung-In Kim, Yang-Sik Shin | 2017-09-12 |
| 9644895 | Heater moving type substrate processing apparatus | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2017-05-09 |
| 9620395 | Apparatus for processing substrate for supplying reaction gas having phase difference | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2017-04-11 |
| 9593415 | Substrate processing apparatus including auxiliary gas supply port | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2017-03-14 |
| 9593418 | Showerhead having cooling system and substrate processing apparatus including the showerhead | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2017-03-14 |
| 9368380 | Substrate processing device with connection space | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2016-06-14 |
| 8771417 | Exhaust unit, exhaust method using the exhaust unit, and substrate processing apparatus including the exhaust unit | Song Keun Yoon, Byoung-Gyu Song, Jae Ho Lee | 2014-07-08 |