Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793949 | Substrate processing apparatus and substrate processing method using the same | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Chang Dol KIM +2 more | 2020-10-06 |
| 10337103 | Substrate processing apparatus | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyoung-Hun Kim, Chang Dol KIM +2 more | 2019-07-02 |
| 10283391 | Multiple gases providing method and multiple gases providing apparatus | Joo Hyun Cho, Chul-Goo Kang, Yong-Ki Kim, Jung Ki Min | 2019-05-07 |
| 10229845 | Substrate treatment apparatus | Byoung-Gyu Song, Kyong-Hun Kim, Yong-Ki Kim, Yang-Sik Shin, Chang Dol KIM | 2019-03-12 |
| 10161036 | Substrate processing apparatus | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyoung-Hun Kim, Chang Dol KIM +2 more | 2018-12-25 |