Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243724 | Batch type substrate processing apparatus | Sung Ho Kang, Jun Young Kim, Suk Bum Yoo, Choon Sik Jeong | 2025-03-04 |
| 11251056 | Substrate processing system | Sung Ho Kang, Sang Young Oh, Gyu Ho Choi | 2022-02-15 |
| 11183372 | Batch type plasma substrate processing apparatus | Sung Ho Kang, Jeong Hee JO, Gyu Ho Choi, Hong Won Lee | 2021-11-23 |
| 11111580 | Apparatus for processing substrate | Sung Ho Kang, Sang Don Lee | 2021-09-07 |
| 10961626 | Plasma processing apparatus having injection ports at both sides of the ground electrode for batch processing of substrates | Jeong Hee JO, Hong Won Lee, Sung Ho Kang, Gyu Ho Choi | 2021-03-30 |
| 10793949 | Substrate processing apparatus and substrate processing method using the same | Jun Jin Hyon, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim +2 more | 2020-10-06 |
| 10337103 | Substrate processing apparatus | Jun Jin Hyon, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyoung-Hun Kim +2 more | 2019-07-02 |
| 10229845 | Substrate treatment apparatus | Jun Jin Hyon, Byoung-Gyu Song, Kyong-Hun Kim, Yong-Ki Kim, Yang-Sik Shin | 2019-03-12 |
| 10161036 | Substrate processing apparatus | Jun Jin Hyon, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyoung-Hun Kim +2 more | 2018-12-25 |