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2021-09-07 |
| 10961626 |
Plasma processing apparatus having injection ports at both sides of the ground electrode for batch processing of substrates |
Jeong Hee JO, Hong Won Lee, Sung Ho Kang, Gyu Ho Choi |
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| 10793949 |
Substrate processing apparatus and substrate processing method using the same |
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Substrate processing apparatus |
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Jun Jin Hyon, Byoung-Gyu Song, Kyong-Hun Kim, Yong-Ki Kim, Yang-Sik Shin |
2019-03-12 |
| 10161036 |
Substrate processing apparatus |
Jun Jin Hyon, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyoung-Hun Kim +2 more |
2018-12-25 |