Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243724 | Batch type substrate processing apparatus | Sung Ho Kang, Chang Dol KIM, Jun Young Kim, Suk Bum Yoo | 2025-03-04 |
| 9818604 | Method for depositing insulating film on recessed portion having high aspect ratio | Hai Won Kim, Chang-Hun Shin, Seok-Yun Kim | 2017-11-14 |