Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818604 | Method for depositing insulating film on recessed portion having high aspect ratio | Hai Won Kim, Chang-Hun Shin, Choon Sik Jeong | 2017-11-14 |
| 9741574 | Cyclic deposition method for thin film and manufacturing method for semiconductor, and semiconductor device | Hai Won Kim | 2017-08-22 |
| 9312125 | Cyclic deposition method for thin film formation, semiconductor manufacturing method, and semiconductor device | Hai Won Kim, Chang-Hun Shin, Jeong Hoon Lee | 2016-04-12 |