Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243767 | Substrate support assembly and substrate processing apparatus | Sang Don Lee, Yong-Ki Kim, Sung Gyun SON, Jae-Woo Kim | 2025-03-04 |
| 10793949 | Substrate processing apparatus and substrate processing method using the same | Jun Jin Hyon, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim +2 more | 2020-10-06 |
| 10593545 | Method for substrate processing using exhaust ports | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim | 2020-03-17 |
| 10337103 | Substrate processing apparatus | Jun Jin Hyon, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyoung-Hun Kim +2 more | 2019-07-02 |
| 10229845 | Substrate treatment apparatus | Jun Jin Hyon, Byoung-Gyu Song, Kyong-Hun Kim, Yong-Ki Kim, Chang Dol KIM | 2019-03-12 |
| 10161036 | Substrate processing apparatus | Jun Jin Hyon, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyoung-Hun Kim +2 more | 2018-12-25 |
| 9953850 | Substrate processing apparatus including heat-shield plate | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim | 2018-04-24 |
| 9875895 | Substrate processing apparatus including exhaust ports and substrate processing method | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim | 2018-01-23 |
| 9869019 | Substrate processing apparatus including processing unit | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim | 2018-01-16 |
| 9758870 | Substrate treatment apparatus, and method for controlling temperature of heater | Sung Tae Je, Il-Kwang Yang, Jae Ho Lee, Kyong-Hun Kim, Myung-In Kim | 2017-09-12 |
| 9644895 | Heater moving type substrate processing apparatus | Il-Kwang Yang, Byoung-Gyu Song, Kyong-Hun Kim, Yong-Ki Kim | 2017-05-09 |
| 9620395 | Apparatus for processing substrate for supplying reaction gas having phase difference | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim | 2017-04-11 |
| 9593418 | Showerhead having cooling system and substrate processing apparatus including the showerhead | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim | 2017-03-14 |
| 9593415 | Substrate processing apparatus including auxiliary gas supply port | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim | 2017-03-14 |
| 9368380 | Substrate processing device with connection space | Il-Kwang Yang, Byoung-Gyu Song, Kyong-Hun Kim, Yong-Ki Kim | 2016-06-14 |