Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8771417 | Exhaust unit, exhaust method using the exhaust unit, and substrate processing apparatus including the exhaust unit | Byoung-Gyu Song, Jae Ho Lee, Kyong-Hun Kim | 2014-07-08 |